Invention Grant
- Patent Title: Method and system for controlling a vapor deposition process
- Patent Title (中): 用于控制气相沉积工艺的方法和系统
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Application No.: US12212506Application Date: 2008-09-17
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Publication No.: US08357266B2Publication Date: 2013-01-22
- Inventor: Milan Ilic , Robert B. Huff , George W. McDonough
- Applicant: Milan Ilic , Robert B. Huff , George W. McDonough
- Applicant Address: US CO Fort Collins
- Assignee: Advanced Energy Industries, Inc.
- Current Assignee: Advanced Energy Industries, Inc.
- Current Assignee Address: US CO Fort Collins
- Agency: Neugeboren O'Dowd PC
- Main IPC: C23C14/34
- IPC: C23C14/34

Abstract:
A method and system for conditioning a vapor deposition target is described. In one illustrative embodiment, a vapor deposition system is operated in which a vapor deposition target is used, the occurrence of electrical arcs in the vapor deposition system is detected, and the vapor deposition target is conditioned by adjusting an output current of a power supply that powers the vapor deposition system and adjusting an interval during which energy is delivered to each arc to deliver substantially the same energy to each arc. In some embodiments, the energy delivered to each arc is approximately equal to the maximum energy that the vapor deposition target can withstand without being damaged. The described method and system significantly reduces the time required to remove impurities from a target and does not require the venting of the vacuum chamber or the removal of the target from the chamber.
Public/Granted literature
- US20090008240A1 METHOD AND SYSTEM FOR CONTROLLING A VAPOR DEPOSITION PROCESS Public/Granted day:2009-01-08
Information query
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