Invention Grant
- Patent Title: Method for forming metal film
- Patent Title (中): 金属膜形成方法
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Application No.: US12977592Application Date: 2010-12-23
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Publication No.: US08357284B2Publication Date: 2013-01-22
- Inventor: Akira Susaki , Tsutomu Nakada , Hideki Tateishi
- Applicant: Akira Susaki , Tsutomu Nakada , Hideki Tateishi
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2009-294616 20091225
- Main IPC: C25D5/12
- IPC: C25D5/12 ; C25D5/10 ; C25D5/34 ; C25D5/38 ; C25D5/44

Abstract:
A metal film-forming method is capable of forming a metal film on a surface of a base metal film, formed on a surface of a substrate, with sufficient adhesion to the base metal film even when a natural oxide film is formed on the surface of the base metal film. The metal film-forming method includes: preparing a substrate having a base metal film formed on a surface; and carrying out electroplating of the substrate using the base metal film as a cathode and another metal as an anode while immersing the substrate in a solution containing a metal complex and a reducing material, both dissolved in a solvent, to form a metal film, deriving from a metal contained in the metal complex, on the surface of the base metal film.
Public/Granted literature
- US20110155581A1 METHOD FOR FORMING METAL FILM Public/Granted day:2011-06-30
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