Invention Grant
US08357484B2 Multilayer dry film resist, method of manufacturing the resist, and method of manufacturing display plate for liquid crystal display panel using the resist
有权
多层干膜抗蚀剂，抗蚀剂的制造方法以及使用该抗蚀剂的液晶显示面板的显示板的制造方法
- Patent Title: Multilayer dry film resist, method of manufacturing the resist, and method of manufacturing display plate for liquid crystal display panel using the resist
- Patent Title (中): 多层干膜抗蚀剂，抗蚀剂的制造方法以及使用该抗蚀剂的液晶显示面板的显示板的制造方法
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Application No.: US11739178Application Date: 2007-04-24
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Publication No.: US08357484B2Publication Date: 2013-01-22
- Inventor: Kyoung-keun Son , Min Kang , Byoung-joo Kim
- Applicant: Kyoung-keun Son , Min Kang , Byoung-joo Kim
- Applicant Address: KR Yongin, Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin, Gyeonggi-do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2006-0056426 20060622
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F1/00 ; H01L21/00
Abstract:
A multilayer dry film resist includes two or more organic films which can be patterned; the multilayer dry film resist includes a base substrate, a first organic film disposed on the base substrate, and a second organic film disposed on the first organic film and including a photosensitizer.
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