Invention Grant
US08357591B2 Method of processing a wafer by using and reusing photolithographic masks
有权
通过使用和重新使用光刻掩模来处理晶片的方法
- Patent Title: Method of processing a wafer by using and reusing photolithographic masks
- Patent Title (中): 通过使用和重新使用光刻掩模来处理晶片的方法
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Application No.: US13086716Application Date: 2011-04-14
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Publication No.: US08357591B2Publication Date: 2013-01-22
- Inventor: Thomas Reed , David Herndon
- Applicant: Thomas Reed , David Herndon
- Applicant Address: US FL Melbourne
- Assignee: Harris Corporation
- Current Assignee: Harris Corporation
- Current Assignee Address: US FL Melbourne
- Agency: Allen, Dyer, Doppelt, Milbrath & Gilchrist, P.A.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of processing a wafer includes establishing a fine of symmetry defining left and right die areas on a front side of the wafer and left and right die areas on a back side. A first mask is used to form a first interconnection layer on the left and right die areas comprising a first portion on the left die area and second portion different than the first portion on the right die area. A second mask is used to form a second interconnection layer on the left and right die areas comprising a third portion on the left die area and fourth portion different than the third portion on the right die area. The first mask is reused to form a third interconnection layer on the left and right die areas on a back side, and the second mask to form a fourth interconnection layer on the left and right die areas on a back side.
Public/Granted literature
- US20120264276A1 METHOD OF PROCESSING A WAFER BY USING AND REUSING PHOTOLITHOGRAPHIC MASKS Public/Granted day:2012-10-18
Information query
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