Invention Grant
- Patent Title: Three-dimensional dynamic random access memory with an ancillary electrode structure
- Patent Title (中): 具有辅助电极结构的三维动态随机存取存储器
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Application No.: US13227315Application Date: 2011-09-07
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Publication No.: US08357964B1Publication Date: 2013-01-22
- Inventor: Chih-Yuan Chen , Meng-Hsien Chen , Chih-Wei Hsiung
- Applicant: Chih-Yuan Chen , Meng-Hsien Chen , Chih-Wei Hsiung
- Applicant Address: TW Taichung
- Assignee: Rexchip Electronics Corporation
- Current Assignee: Rexchip Electronics Corporation
- Current Assignee Address: TW Taichung
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/94

Abstract:
A three-dimensional dynamic random access memory with an ancillary electrode structure includes a substrate, at least one bit line formed on the substrate, at least one pillar element formed on a growth zone of the bit line, an ancillary electrode, a character line parallel with the substrate and perpendicular to the bit line, and at least one capacitor connecting to the pillar element. The bit line is formed on the substrate by doping and diffusing a doping element. The ancillary electrode is located on a separation zone of the bit line and adjacent to the pillar element. The character line is insulated from the ancillary electrode and incorporates with the bit line to output or input electronic data to the capacitor. Through the ancillary electrode, impedance of the bit line can be controlled to enhance conductivity of the bit line.
Information query
IPC分类: