Invention Grant
US08358010B2 Method for realizing a nanometric circuit architecture between standard electronic components and semiconductor device obtained with said method 有权
用于实现标准电子部件与利用所述方法获得的半导体器件之间的纳米电路结构的方法

Method for realizing a nanometric circuit architecture between standard electronic components and semiconductor device obtained with said method
Abstract:
A method for realizing a nanometric circuit architecture includes: realizing plural active areas on a semiconductor substrate; realizing on the substrate a seed layer of a first material; realizing a mask-spacer of a second material on the seed layer in a region comprised between the active areas; realizing a mask overlapping the mask-spacer and extending in a substantially perpendicular direction thereto; selectively removing the seed layer exposed on the substrate; selectively removing the mask and the mask-spacer obtaining a seed-spacer comprising a linear portion extending in that region and a portion substantially orthogonal thereto; realizing by MSPT from the seed-spacer an insulating spacer reproducing at least part of the profile of the seed-spacer; realizing by MSPT a nano-wire of conductive material from the seed-spacer or insulating spacer, the nano-wire comprising a first portion at least partially extending in the region and a second portion contacting a respective active area.
Information query
Patent Agency Ranking
0/0