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US08358016B2 Semiconductor package having an internal cooling system 失效
具有内部冷却系统的半导体封装

Semiconductor package having an internal cooling system
Abstract:
A semiconductor package having an internal cooling system is presented which includes a semiconductor chip and a through-electrode. The semiconductor chip has a circuit section. The through-electrode passes through an upper surface and a lower surface the semiconductor chip. The through-electrode is electrically connected with the circuit section of the semiconductor chip. The through-electrode also has a through-hole for allowing cooling fluid to flow therethrough.
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