Invention Grant
- Patent Title: High speed optical scanning mirror system using piezoelectric benders
- Patent Title (中): 高速光学扫描镜系统采用压电弯曲机
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Application No.: US12927506Application Date: 2010-11-17
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Publication No.: US08358048B2Publication Date: 2013-01-22
- Inventor: Johannes G. Smits
- Applicant: Johannes G. Smits
- Applicant Address: NL Middelburg
- Assignee: J. G. Smits
- Current Assignee: J. G. Smits
- Current Assignee Address: NL Middelburg
- Main IPC: H10L41/08
- IPC: H10L41/08

Abstract:
A construction is presented, which is comprised of two piezoelectric bending cantilevers, of different lengths, called a first bender and a second bender respectively, in which both benders bend in opposite directions. The second bender is mechanically in series connected to the first bender, thereby increasing the rotation angle of the tip of the second bender. The length of the second bender is chosen thus that in sinusoidal excitation, the tip of the second bender remains at the same point throughout the entire cycle, while it does undergo rotation. In this fashion a virtual axis at the tip of the second bender is created. The width of both benders is chosen such that the moment that the second bender can exert on an object that is connected to it, enables the construction to drive an optical element to scanning vibratory rotary motion with a large angle at high frequencies.
Public/Granted literature
- US20120119619A1 High speed optical scanning mirror system using piezoelectric benders Public/Granted day:2012-05-17
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