Invention Grant
- Patent Title: Lighting method of light source apparatus
- Patent Title (中): 光源设备的照明方法
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Application No.: US12659323Application Date: 2010-03-04
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Publication No.: US08358069B2Publication Date: 2013-01-22
- Inventor: Taku Sumitomo , Toshio Yokota
- Applicant: Taku Sumitomo , Toshio Yokota
- Applicant Address: JP Tokyo US MA Woburn
- Assignee: Ushio Denki Kabushiki Kaisha,Engergetiq Technology, Inc.
- Current Assignee: Ushio Denki Kabushiki Kaisha,Engergetiq Technology, Inc.
- Current Assignee Address: JP Tokyo US MA Woburn
- Agency: Rader, Fishman & Grauer PLLC
- Priority: JP2009-050161 20090304
- Main IPC: H01J17/16
- IPC: H01J17/16 ; H05G2/00 ; H05B37/02

Abstract:
A method of lighting a light source apparatus that has a discharge lamp, a reflection mirror for reflecting light emitted from the discharge lamp, a light emission optical system for irradiating a work piece with light, one or more laser oscillator for emitting a laser beam to the discharge lamp, and a discharge starting unit for starting discharge. The method includes removing deposits adhering to an inner face of the discharge lamp by irradiating a discharge vessel with the laser beam from the first laser oscillator, starting discharge in the discharge vessel by the discharge starting unit, and condensing the laser beam from a second laser oscillator, into the discharge vessel.
Public/Granted literature
- US20100225232A1 Lighting method of light source apparatus Public/Granted day:2010-09-09
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