Invention Grant
- Patent Title: Probe mark inspection
- Patent Title (中): 探针检查
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Application No.: US12556910Application Date: 2009-09-10
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Publication No.: US08358831B2Publication Date: 2013-01-22
- Inventor: Rodney Doe , John T. Strom
- Applicant: Rodney Doe , John T. Strom
- Applicant Address: US NJ Flanders
- Assignee: Rudolph Technologies, Inc.
- Current Assignee: Rudolph Technologies, Inc.
- Current Assignee Address: US NJ Flanders
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: G06K9/00
- IPC: G06K9/00
Abstract:
Probe mark inspection involves a recipe based on unique image characteristics or combinations of unique image characteristics. Result images are correlated with a reference created to determine which image characteristic or combination of image characteristics provides an improved contrast.
Public/Granted literature
- US20100061620A1 PROBE MARK INSPECTION Public/Granted day:2010-03-11
Information query
