Invention Grant
- Patent Title: Magnetic device inspection apparatus and magnetic device inspection method
- Patent Title (中): 磁性装置检查装置和磁性装置检查方法
-
Application No.: US12649468Application Date: 2009-12-30
-
Publication No.: US08359661B2Publication Date: 2013-01-22
- Inventor: Takehiro Tachizaki , Masahiro Watanabe , Hideaki Sasazawa , Minoru Yoshida , Tsuneo Nakagomi , Teruaki Tokutomi
- Applicant: Takehiro Tachizaki , Masahiro Watanabe , Hideaki Sasazawa , Minoru Yoshida , Tsuneo Nakagomi , Teruaki Tokutomi
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2009-000119 20090105; JP2009-185839 20090810
- Main IPC: G01Q60/52
- IPC: G01Q60/52

Abstract:
Applying an alternating current to a magnetic head as a sample generates an alternate-current magnetic field from the sample. A cantilever includes a probe that is made of a magnetic material or is coated with a magnetic material. The cantilever is displaced when it approaches the sample. Detecting the displacement of the cantilever detects distribution of the magnetic field from the sample. It is possible to fast measure distribution of the magnetic field generated from the sample when a frequency of the alternating current applied to the sample differs from a resonance frequency of the cantilever.
Public/Granted literature
- US20100205699A1 MAGNETIC DEVICE INSPECTION APPARATUS AND MAGNETIC DEVICE INSPECTION METHOD Public/Granted day:2010-08-12
Information query