Invention Grant
US08359661B2 Magnetic device inspection apparatus and magnetic device inspection method 失效
磁性装置检查装置和磁性装置检查方法

Magnetic device inspection apparatus and magnetic device inspection method
Abstract:
Applying an alternating current to a magnetic head as a sample generates an alternate-current magnetic field from the sample. A cantilever includes a probe that is made of a magnetic material or is coated with a magnetic material. The cantilever is displaced when it approaches the sample. Detecting the displacement of the cantilever detects distribution of the magnetic field from the sample. It is possible to fast measure distribution of the magnetic field generated from the sample when a frequency of the alternating current applied to the sample differs from a resonance frequency of the cantilever.
Information query
Patent Agency Ranking
0/0