Invention Grant
- Patent Title: Method for reducing tip-to-tip spacing between lines
- Patent Title (中): 减少线间距尖端间距的方法
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Application No.: US12352051Application Date: 2009-01-12
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Publication No.: US08361704B2Publication Date: 2013-01-29
- Inventor: Matthew E. Colburn , Wai-kin Li , Haining S. Yang
- Applicant: Matthew E. Colburn , Wai-kin Li , Haining S. Yang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Wenjie Li; Catherine Ivers
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
This invention provides a method for reducing tip-to-tip spacing between lines using a combination of photolithographic and copolymer self-assembling lithographic techniques. A mask layer is first formed over a substrate with a line structure. A trench opening of a width d is created in the mask layer. A layer of a self-assembling block copolymer is then applied over the mask layer. The block copolymer layer is annealed to form a single unit polymer block of a width or a diameter w which is smaller than d inside the trench opening. The single unit polymer block is selectively removed to form a single opening of a width or a diameter w inside the trench opening. An etch transfer process is performed using the single opening as a mask to form an opening in the line structure in the substrate.
Public/Granted literature
- US20100178615A1 METHOD FOR REDUCING TIP-TO-TIP SPACING BETWEEN LINES Public/Granted day:2010-07-15
Information query
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