Invention Grant
US08362846B2 Package manufacturing method and apparatus for piezoelectric oscillator
有权
用于压电振荡器的封装制造方法和装置
- Patent Title: Package manufacturing method and apparatus for piezoelectric oscillator
- Patent Title (中): 用于压电振荡器的封装制造方法和装置
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Application No.: US13011401Application Date: 2011-01-21
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Publication No.: US08362846B2Publication Date: 2013-01-29
- Inventor: Kazuyoshi Sugama , Masashi Numata
- Applicant: Kazuyoshi Sugama , Masashi Numata
- Applicant Address: JP Chiba
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2010-013613 20100125
- Main IPC: H03B5/32
- IPC: H03B5/32

Abstract:
A package manufacturing method capable of preventing recess portions from being formed in penetration electrodes. The package manufacturing method includes an electrode member forming step of inserting core portions made of a metallic material into cylindrical members made of a first glass material and heating the cylindrical members so as to weld the cylindrical members to the core portions, thus forming electrode members; a hole forming step of forming holes, in which the electrode members 8 are disposed, on a penetration electrode forming board wafer made of a second glass material; an electrode member disposing step of disposing the electrode members in the holes formed on the wafer; a welding step of heating the wafer and the electrode members so as to be welded to each other; and a cooling step of cooling the wafer and the electrode members. In the welding step, a pressurizing mold is placed on the surface of the wafer, the wafer is pressed by the pressurizing mold, and the wafer and the electrode members are heated to a temperature higher than the softening point of the first glass material and the softening point of the second glass material, whereby the wafer and the electrode members are welded to each other.
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