Invention Grant
- Patent Title: Displacement detecting device
- Patent Title (中): 位移检测装置
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Application No.: US13163824Application Date: 2011-06-20
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Publication No.: US08363230B2Publication Date: 2013-01-29
- Inventor: Hideaki Tamiya
- Applicant: Hideaki Tamiya
- Applicant Address: JP
- Assignee: Mori Seiki Co., Ltd.
- Current Assignee: Mori Seiki Co., Ltd.
- Current Assignee Address: JP
- Agency: Cantor Colburn LLP
- Priority: JP2010-142291 20100623
- Main IPC: G01B11/14
- IPC: G01B11/14

Abstract:
A displacement detecting device comprises: a light source, a first beam splitter adapted to split the light emitted from the light source into a first beam and a second beam, a reflecting member adapted to reflect the first beam, an objective lens adapted to condense the second beam on a surface-to-be-measured, a first light receiving section adapted to receive interference light of the reflected first beam and the reflected second beam, a relative position information output section adapted to output relative position information in height direction of the surface-to-be-measured, a second beam splitter adapted to extract a part of the reflected second beam, an astigmatism generator adapted to generate astigmatism in the extracted second beam, a second light receiving section adapted to receive the second beam having astigmatism, and an absolute position information output section adapted to generate absolute position information in height direction of the surface-to-be-measured.
Public/Granted literature
- US20110317172A1 DISPLACEMENT DETECTING DEVICE Public/Granted day:2011-12-29
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