Invention Grant
- Patent Title: MEMS microphone with spring suspended backplate
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Application No.: US12774263Application Date: 2010-05-05
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Publication No.: US08363860B2Publication Date: 2013-01-29
- Inventor: Xin Zhang
- Applicant: Xin Zhang
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
A MEMS microphone has a base, a backplate, and a backplate spring suspending the backplate from the base. The microphone also has a diaphragm forming a variable capacitor with the backplate.
Public/Granted literature
- US20100278372A1 MEMS Microphone with Spring Suspended Backplate Public/Granted day:2010-11-04
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