Invention Grant
- Patent Title: Methods for manufacturing piezoelectric vibrating devices
- Patent Title (中): 制造压电振动装置的方法
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Application No.: US12203035Application Date: 2008-09-02
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Publication No.: US08365371B2Publication Date: 2013-02-05
- Inventor: Yoshiaki Amano
- Applicant: Yoshiaki Amano
- Applicant Address: JP Tokyo
- Assignee: Nihon Dempa Kogyo Co., Ltd.
- Current Assignee: Nihon Dempa Kogyo Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Klarquist Sparkman, LLP
- Priority: JP2007-247385 20070925
- Main IPC: H04R17/10
- IPC: H04R17/10 ; C03C25/70

Abstract:
Methods are disclosed for manufacturing tuning-fork type piezoelectric vibrating devices. In an exemplary method a metal film is formed on both surfaces of a piezoelectric wafer, followed by application of photoresist. A first metal-film-etching step etches the metal film after removal of the photoresist layer outside the profile outline of the devices. A first piezoelectric-etching step etches the wafer surface but not through to the rear surface; thus, outside the profile outline the metal film is removed. A second metal-film-etching step etches the metal film after removal of the photoresist layer from first groove regions. A second piezoelectric-etching step etches outside the profile outline and the groove regions through to the rear surface.
Public/Granted literature
- US20090077781A1 PIEZOELECTRIC VIBRATING DEVICES AND METHODS FOR MANUFACTURING SAME Public/Granted day:2009-03-26
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