Invention Grant
US08365372B2 Piezoelectric oscillating circuit, method for manufacturing the same and filter arrangement 有权
压电振荡电路,制造方法和滤波器布置

Piezoelectric oscillating circuit, method for manufacturing the same and filter arrangement
Abstract:
In a method for manufacturing a piezoelectric oscillating circuit in thin film technology, wherein the oscillating circuit includes a predetermined natural frequency and a plurality of layers, first of all at least a first layer of the piezoelectric oscillating circuit is generated. Subsequently, by processing the first layer a frequency correction is performed. Subsequently, at least a second layer of the piezoelectric oscillating circuit is generated and processed for performing a second frequency correction.
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