Invention Grant
- Patent Title: Methods and apparatus for supporting substrates
- Patent Title (中): 用于支撑基材的方法和装置
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Application No.: US11140777Application Date: 2005-05-31
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Publication No.: US08365682B2Publication Date: 2013-02-05
- Inventor: Wendell T. Blonigan , Carl Sorensen , John M. White , Robin L. Tiner
- Applicant: Wendell T. Blonigan , Carl Sorensen , John M. White , Robin L. Tiner
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: B65G49/07
- IPC: B65G49/07

Abstract:
Substrate support methods and apparatus include vertically aligned lift pins that have bearing surfaces that engage friction plates and/or magnetic fields to maintain the vertical orientation of the lift pins during substrate lifting. In some embodiments, a magnetic field and/or weighting may alternatively or additionally be used to control the vertical orientation of the lift pins, limit the angle of the lift pins, and/or prevent the lift pins from unintentionally binding in a susceptor as the susceptor is raised and prevent the resulting uneven support of the substrate.
Public/Granted literature
- US20050265818A1 Methods and apparatus for supporting substrates Public/Granted day:2005-12-01
Information query
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