Invention Grant
- Patent Title: Piezoelectric element, actuator device, liquid ejecting head, and liquid ejecting apparatus
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Application No.: US12767566Application Date: 2010-04-26
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Publication No.: US08366248B2Publication Date: 2013-02-05
- Inventor: Masato Shimada , Xin-Shan Li
- Applicant: Masato Shimada , Xin-Shan Li
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2006-216132 20060808
- Main IPC: B41J2/045
- IPC: B41J2/045
Abstract:
A piezoelectric element includes a lower electrode film disposed on a substrate, a piezoelectric layer 70 disposed on the lower electrode film, a upper electrode film 80 disposed on the piezoelectric layer 70, wherein the piezoelectric layer 70 is formed of a plurality of columnar grains 70a, and the upper electrode film 80 conforms to the surface shape of each of the grains 70a of the piezoelectric layer 70.
Public/Granted literature
- US20100201757A1 PIEZOELECTRIC ELEMENT, ACTUATOR DEVICE, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS Public/Granted day:2010-08-12
Information query
IPC分类:
