Invention Grant
- Patent Title: Evaporation source
- Patent Title (中): 蒸发源
-
Application No.: US12654044Application Date: 2009-12-08
-
Publication No.: US08366831B2Publication Date: 2013-02-05
- Inventor: Jong-Woo Lee , Tae-Seung Kim
- Applicant: Jong-Woo Lee , Tae-Seung Kim
- Applicant Address: KR Giheung-Gu, Yongin, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Giheung-Gu, Yongin, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2008-0125094 20081210
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
The present invention relates to an evaporation source used in a vacuum deposition apparatus for forming an organic film or a metal film. The present invention provides an evaporation source including: a crucible accommodating a deposition material and having an opening portion through which the deposition material passes; a mesh member installed in the opening portion of the crucible and having a plurality of holes; and thermally conductive balls coated on the mesh member. Here, the thermally conductive balls are provided to cover the deposition material having a predetermined interval with the deposition material, not being mixed with the deposition material filling the crucible.
Public/Granted literature
- US20100139564A1 Evaporation source Public/Granted day:2010-06-10
Information query
IPC分类: