Invention Grant
US08366871B2 Method and apparatus for cleaning and surface conditioning objects using plasma
有权
使用等离子体清洁和表面调理物体的方法和设备
- Patent Title: Method and apparatus for cleaning and surface conditioning objects using plasma
- Patent Title (中): 使用等离子体清洁和表面调理物体的方法和设备
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Application No.: US11421977Application Date: 2006-06-02
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Publication No.: US08366871B2Publication Date: 2013-02-05
- Inventor: Peter Frank Kurunczi
- Applicant: Peter Frank Kurunczi
- Applicant Address: US NJ Moorestown
- Assignee: Ionfield Holdings, LLC
- Current Assignee: Ionfield Holdings, LLC
- Current Assignee Address: US NJ Moorestown
- Agency: Pepper Hamilton LLP
- Main IPC: C23F1/00
- IPC: C23F1/00 ; H01L21/306 ; C23C16/00

Abstract:
A method and apparatus for cleaning and surface conditioning objects using plasma are disclosed. One embodiment of the apparatus for cleaning conductive objects using plasma discloses at least one planar dielectric barrier plate having a first surface and a second surface, and at least one electrode proximate the second surface of the at least one planar dielectric barrier plate, wherein the planar dielectric barrier plate is positioned to receive at least one object substantially orthogonally proximate the first surface. Another embodiment of the apparatus includes a ground plane for cleaning non-conductive objects, wherein the ground plane has apertures sized and arranged for receiving each object to be cleaned.
Public/Granted literature
- US20060201916A1 METHOD AND APPARATUS FOR CLEANING AND SURFACE CONDITIONING OBJECTS USING PLASMA Public/Granted day:2006-09-14
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