- Patent Title: Plasma-resistant ceramics with controlled electrical resistivity
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Application No.: US11890156Application Date: 2007-08-02
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Publication No.: US08367227B2Publication Date: 2013-02-05
- Inventor: Jennifer Y. Sun , Kenneth S. Collins , Ren-Guan Duan , Senh Thach , Thomas Graves , Xiaoming He , Jie Yuan
- Applicant: Jennifer Y. Sun , Kenneth S. Collins , Ren-Guan Duan , Senh Thach , Thomas Graves , Xiaoming He , Jie Yuan
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agent Shirley L. Church, Esq
- Main IPC: B32B9/00
- IPC: B32B9/00 ; B32B19/00 ; B32B17/10 ; B32B15/04 ; C04B35/48 ; C04B35/00 ; C04B35/50 ; C04B35/51
Abstract:
Specialty ceramic materials which resist corrosion/erosion under semiconductor processing conditions which employ a corrosive/erosive plasma. The corrosive plasma may be a halogen-containing plasma. The specialty ceramic materials have been modified to provide a controlled electrical resistivity which suppresses plasma arcing potential.
Public/Granted literature
- US20090036292A1 Plasma-resistant ceramics with controlled electrical resistivity Public/Granted day:2009-02-05
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