Invention Grant
- Patent Title: Group III nitride semiconductor light-emitting device
- Patent Title (中): III族氮化物半导体发光器件
-
Application No.: US13304050Application Date: 2011-11-23
-
Publication No.: US08367445B2Publication Date: 2013-02-05
- Inventor: Koji Okuno
- Applicant: Koji Okuno
- Applicant Address: JP Kiyosu-shi, Aichi-ken
- Assignee: Toyoda Gosei Co., Ltd.
- Current Assignee: Toyoda Gosei Co., Ltd.
- Current Assignee Address: JP Kiyosu-shi, Aichi-ken
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2010-262571 20101125
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L33/00

Abstract:
A method for producing a Group III nitride semiconductor light-emitting device includes forming a first stripe-pattern embossment on the top surface of a sapphire substrate, so that first grooves parallel to the x-axis direction (the c-axis direction of the sapphire substrate) are periodically arranged at specific intervals. Subsequently, an insulating film is formed over the entire surface of the first stripe-pattern embossment. Next, a second stripe-pattern embossment is formed so that second grooves, each having a flat bottom surface, are periodically arranged at specific intervals and parallel to the y-axis direction, which is orthogonal to the x-axis direction. A GaN crystal is grown through MOCVD on side surfaces of each second groove of the sapphire substrate, to thereby form, on the sapphire substrate, an m-plane GaN base layer. An LED device structure is formed on the base layer, to thereby produce a light-emitting device.
Public/Granted literature
- US20120135557A1 GROUP III NITRIDE SEMICONDUCTOR LIGHT-EMITTING DEVICE Public/Granted day:2012-05-31
Information query
IPC分类: