Invention Grant
- Patent Title: Method of manufacturing a vertical-type semiconductor device and method of operating a vertical-type semiconductor device
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Application No.: US13102187Application Date: 2011-05-06
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Publication No.: US08367491B2Publication Date: 2013-02-05
- Inventor: Yong-Hoon Son , Jong-Wook Lee , Jong-Hyuk Kang
- Applicant: Yong-Hoon Son , Jong-Wook Lee , Jong-Hyuk Kang
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Onello & Mello LLP
- Priority: KR10-2008-0052368 20080604
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
In a vertical-type semiconductor device, a method of manufacturing the same and a method of operating the same, the vertical-type semiconductor device includes a single-crystalline semiconductor pattern having a pillar shape provided on a substrate, a gate surrounding sidewalls of the single-crystalline semiconductor pattern and having an upper surface lower than an upper surface of the single-crystalline semiconductor pattern, a mask pattern formed on the upper surface of the gate, the mask pattern having an upper surface coplanar with the upper surface of the single-crystalline semiconductor pattern, a first impurity region in the substrate under the single-crystalline semiconductor pattern, and a second impurity region under the upper surface of the single-crystalline semiconductor pattern. The vertical-type pillar transistor formed in the single-crystalline semiconductor pattern may provide excellent electrical properties. The mask pattern is not provided on the upper surface of the single-crystalline semiconductor pattern in the second impurity region, to thereby reduce failures of processes.
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