Invention Grant
- Patent Title: Process for producing silicon carbide semiconductor device
- Patent Title (中): 碳化硅半导体器件的制造方法
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Application No.: US12067028Application Date: 2006-09-01
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Publication No.: US08367510B2Publication Date: 2013-02-05
- Inventor: Toshiyuki Miyanagi , Hidekazu Tsuchida , Isaho Kamata , Masahiro Nagano , Yoshitaka Sugawara , Koji Nakayama , Ryosuke Ishii
- Applicant: Toshiyuki Miyanagi , Hidekazu Tsuchida , Isaho Kamata , Masahiro Nagano , Yoshitaka Sugawara , Koji Nakayama , Ryosuke Ishii
- Applicant Address: JP Tokyo
- Assignee: Central Research Institute of Electric Power Industry
- Current Assignee: Central Research Institute of Electric Power Industry
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2005-266884 20050914
- International Application: PCT/JP2006/317339 WO 20060901
- International Announcement: WO2007/032214 WO 20070322
- Main IPC: H01L21/331
- IPC: H01L21/331

Abstract:
In a bipolar silicon carbide semiconductor device in which an electron and a hole recombine with each other during current passage within a silicon carbide epitaxial film grown from a surface of a silicon carbide single crystal substrate, an object described herein is the reduction of defects which are the nuclei of a stacking fault which is expanded by current passage, thereby suppressing the increase of the forward voltage of the bipolar silicon carbide semiconductor device. In a method for producing a bipolar silicon carbide semiconductor device, the device is subjected to a thermal treatment at a temperature of 300° C. or higher in the final step of production. Preferably, the above-mentioned thermal treatment is carried out after the formation of electrodes and then the resulting bipolar silicon carbide semiconductor device is mounted in a package.
Public/Granted literature
- US20090317983A1 Process for Producing Silicon Carbide Semiconductor Device Public/Granted day:2009-12-24
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