Invention Grant
US08367547B2 Method for creating a metal crystalline region, in particular in an integrated circuit
失效
用于产生金属结晶区域的方法,特别是在集成电路中
- Patent Title: Method for creating a metal crystalline region, in particular in an integrated circuit
- Patent Title (中): 用于产生金属结晶区域的方法,特别是在集成电路中
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Application No.: US13380314Application Date: 2010-07-01
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Publication No.: US08367547B2Publication Date: 2013-02-05
- Inventor: Cyril Cayron , Sylvain Maitrejean
- Applicant: Cyril Cayron , Sylvain Maitrejean
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0954593 20090703
- International Application: PCT/EP2010/059388 WO 20100701
- International Announcement: WO2011/000923 WO 20110106
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
The method comprises affixing a thin sheet of crystal (8) onto metal (6) of same type as the sheet but amorphous or of small grain size, deposited in trenches of a substrate (1) to form interconnect lines for example. Annealing progressively imposes the crystalline structure of the sheet onto the lines. When the crystal (8) is removed, highly conductive crystalline lines are obtained since the grains thereof have been greatly enlarged.
Public/Granted literature
- US20120094486A1 METHOD FOR CREATING A METAL CRYSTALLINE REGION, IN PARTICULAR IN AN INTEGRATED CIRCUIT Public/Granted day:2012-04-19
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