Invention Grant
US08367547B2 Method for creating a metal crystalline region, in particular in an integrated circuit 失效
用于产生金属结晶区域的方法,特别是在集成电路中

Method for creating a metal crystalline region, in particular in an integrated circuit
Abstract:
The method comprises affixing a thin sheet of crystal (8) onto metal (6) of same type as the sheet but amorphous or of small grain size, deposited in trenches of a substrate (1) to form interconnect lines for example. Annealing progressively imposes the crystalline structure of the sheet onto the lines. When the crystal (8) is removed, highly conductive crystalline lines are obtained since the grains thereof have been greatly enlarged.
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