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US08367981B2 Baking apparatus, baking method and method of reducing gap width 有权
烘烤设备,烘烤方法和减少间隙宽度的方法

Baking apparatus, baking method and method of reducing gap width
Abstract:
A baking apparatus including a hot plate and a substrate rotation member is provided. The hot plate has a heating surface. The substrate rotation member includes a rotation ring and a plurality of support arms. The rotation ring is configured to surround the hot plate. The support arms are disposed over the heating surface of the hot plate. Each of the support arms includes a connection part and a support part, wherein the connection part is configured to connect the rotation ring and the support part, and a supporting surface of the support part for supporting the substrate is higher than the heating surface of the hot plate.
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