Invention Grant
US08367983B2 Apparatus including heating source reflective filter for pyrometry
有权
装置包括用于高温计的加热源反射滤光片
- Patent Title: Apparatus including heating source reflective filter for pyrometry
- Patent Title (中): 装置包括用于高温计的加热源反射滤光片
-
Application No.: US12483770Application Date: 2009-06-12
-
Publication No.: US08367983B2Publication Date: 2013-02-05
- Inventor: Joseph M. Ranish , Aaron M. Hunter , Blake R. Koelmel , Bruce E. Adams
- Applicant: Joseph M. Ranish , Aaron M. Hunter , Blake R. Koelmel , Bruce E. Adams
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Diehl Servilla LLC
- Main IPC: H05B3/68
- IPC: H05B3/68 ; F27B5/14 ; F26B19/00 ; C23C16/00
Abstract:
Methods and apparatus for processing substrates and measuring the temperature using radiation pyrometry are disclosed. A reflective layer is provided on a window of a processing chamber. A radiation source providing radiation in a first range of wavelengths heats the substrate, the substrate being transparent to radiation in a second range of wavelengths within the first range of wavelengths for a predetermined temperature range. Radiation within the second range of wavelength is reflected by the reflective layer.
Public/Granted literature
- US20090289053A1 Apparatus Including Heating Source Reflective Filter for Pyrometry Public/Granted day:2009-11-26
Information query
