Invention Grant
US08368005B2 Optical detection method and optical MEMS detector, and method for making MEMS detector
有权
光学检测方法和光学MEMS检测器，以及制造MEMS检测器的方法
- Patent Title: Optical detection method and optical MEMS detector, and method for making MEMS detector
- Patent Title (中): 光学检测方法和光学MEMS检测器，以及制造MEMS检测器的方法
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Application No.: US12627374Application Date: 2009-11-30
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Publication No.: US08368005B2Publication Date: 2013-02-05
- Inventor: Chuan-Wei Wang , Hsin-Hui Hsu , Chih-Hung Lu
- Applicant: Chuan-Wei Wang , Hsin-Hui Hsu , Chih-Hung Lu
- Applicant Address: TW Hsin-Chu
- Assignee: Pixart Imaging Incorporation
- Current Assignee: Pixart Imaging Incorporation
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Main IPC: G01D5/34
- IPC: G01D5/34 ; G01B11/14
Abstract:
The present invention discloses an optical MEMS detector, comprising: a substrate; at least one photo diode in a region within the substrate; an isolation wall above the substrate and surrounding the photo diode region; and at least one movable part having an opening for light to pass through and reach the photo diode, wherein when the at least one movable part is moved, an amount of light reaching the photo diode is changed.
Public/Granted literature
- US20110126623A1 OPTICAL DETECTION METHOD AND OPTICAL MEMS DETECTOR, AND METHOD FOR MAKING MEMS DETECTOR Public/Granted day:2011-06-02
Information query
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