Invention Grant
- Patent Title: Radiation system and lithographic apparatus
- Patent Title (中): 辐射系统和光刻设备
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Application No.: US12832258Application Date: 2010-07-08
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Publication No.: US08368040B2Publication Date: 2013-02-05
- Inventor: Erik Roelof Loopstra , Vladimir Vitalevich Ivanov , Johannes Hubertus Josephina Moors , Gerardus Hubertus Petrus Maria Swinkels , Andrei Mikhailovich Yakunin , Dennis De Graaf , Uwe Bruno Heini Stamm
- Applicant: Erik Roelof Loopstra , Vladimir Vitalevich Ivanov , Johannes Hubertus Josephina Moors , Gerardus Hubertus Petrus Maria Swinkels , Andrei Mikhailovich Yakunin , Dennis De Graaf , Uwe Bruno Heini Stamm
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G21K5/04
- IPC: G21K5/04 ; H01J35/20

Abstract:
A radiation system includes a target material supply configured to supply droplets of target material along a trajectory, and a laser system that includes an amplifier and optics. The optics are configured to establish a first beam path which passes through the amplifier and through a first location on the trajectory, and to establish a second beam path which passes through the amplifier and through a second location on the trajectory. The laser system is configured to generate a first pulse of laser radiation when photons emitted from the amplifier are reflected along the first beam path by a droplet of target material at the first location on the trajectory. The laser system is configured to generate a second pulse of laser radiation when photons emitted from the amplifier are reflected along the second beam path by the droplet of target material at the second location on the trajectory.
Public/Granted literature
- US20110013166A1 RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS Public/Granted day:2011-01-20
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