Invention Grant
- Patent Title: Multilayer-interconnection first integration scheme for graphene and carbon nanotube transistor based integration
- Patent Title (中): 石墨烯和碳纳米管晶体管集成的多层互连第一整合方案
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Application No.: US13039475Application Date: 2011-03-03
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Publication No.: US08368053B2Publication Date: 2013-02-05
- Inventor: Zihong Liu , Ghavam G. Shahidi
- Applicant: Zihong Liu , Ghavam G. Shahidi
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael. J. Chang, LLC
- Agent Vazken Alexanian
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/336

Abstract:
Integrated circuit multilayer integration techniques are provided. In one aspect, a method of fabricating an integrated circuit is provided. The method includes the following steps. A substrate is provided. A plurality of interconnect layers are formed on the substrate arranged in a stack, each interconnect layer comprising one or more metal lines, wherein the metal lines in a given one of the interconnect layers are larger than the metal lines in the interconnect layers, if present, above the given interconnect layer in the stack and wherein the metal lines in the given interconnect layer are smaller than the metal lines in the interconnect layers, if present, below the given interconnect layer in the stack. At least one transistor is formed on a top-most layer of the stack.
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Information query
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