Invention Grant
- Patent Title: Micro device having a movable structure
- Patent Title (中): 具有可移动结构的微型装置
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Application No.: US12710571Application Date: 2010-02-23
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Publication No.: US08368196B2Publication Date: 2013-02-05
- Inventor: Teruhisa Akashi , Hirofumi Funabashi , Motohiro Fujiyoshi , Yutaka Nonomura
- Applicant: Teruhisa Akashi , Hirofumi Funabashi , Motohiro Fujiyoshi , Yutaka Nonomura
- Applicant Address: JP Aichi
- Assignee: Kabushiki Kaisha Toyota Chuo Kenkyusho
- Current Assignee: Kabushiki Kaisha Toyota Chuo Kenkyusho
- Current Assignee Address: JP Aichi
- Agency: Oliff & Berridge, PLC
- Priority: JP2009-046414 20090227
- Main IPC: H01L23/02
- IPC: H01L23/02
Abstract:
The micro device includes a support substrate, and a movable structure configured to move with respect to the support substrate. At least one of the support substrate and the movable structure is provided with at least one protrusion protruding towards the other of the support substrate and the movable structure. Further, a base portion extending into the one of the support substrate and the movable structure is provided integrally with the at least one protrusion. With this configuration, the protrusion is securely held by the base portion, and the detachment of the protrusion can therefore be prevented even after repeated collisions between the support substrate and the movable structure via the protrusion.
Public/Granted literature
- US20100219716A1 MICRO DEVICE HAVING A MOVABLE STRUCTURE Public/Granted day:2010-09-02
Information query
IPC分类:
