Invention Grant
US08368305B2 Rotating wheel electrode device for gas discharge sources comprising wheel cover for high power operation 有权
用于气体放电源的旋转轮电极装置,包括用于大功率操作的轮盖

Rotating wheel electrode device for gas discharge sources comprising wheel cover for high power operation
Abstract:
The present invention relates to an electrode device (1, 2) for gas discharge sources and to a gas discharge source having one or two of said electrode devices (1, 2). With the proposed design of the cover (8), an efficient cooling of the electrode wheel (7) is achieved, allowing high electrical powers for operating gas discharge sources with such an electrode device.
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