Invention Grant
- Patent Title: Acceleration sensor
- Patent Title (中): 加速度传感器
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Application No.: US12920682Application Date: 2008-10-28
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Publication No.: US08368387B2Publication Date: 2013-02-05
- Inventor: Nobuaki Konno
- Applicant: Nobuaki Konno
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-103406 20080411
- International Application: PCT/JP2008/069522 WO 20081028
- International Announcement: WO2009/125510 WO 20091015
- Main IPC: G01P15/00
- IPC: G01P15/00 ; G01P15/08

Abstract:
An acceleration sensor includes a substrate, first and second torsion beams, first and second detection frames, first and second detection electrodes, first and second link beams, and an inertial mass body. The first and second torsion beams are distorted around the first and second torsion axes. The first and second detection frames are rotated about the first and second torsion axes. The first and second detection electrodes detect an angle formed between the substrate and each of the first and second detection frames. The first link beam is on a first axis located at a position shifted from a position of the first torsion axis to one end side of the first detection frame along a direction crossing the first torsion axis. The second link beam is on a second axis located at a position shifted from a position of the second torsion axis in a direction identical to the direction of shift from the position of the first torsion axis.
Public/Granted literature
- US20110031959A1 ACCELERATION SENSOR Public/Granted day:2011-02-10
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