Invention Grant
- Patent Title: Method for testing electronic components of a repetitive pattern under defined thermal conditions
- Patent Title (中): 在确定的热条件下测试重复图案的电子部件的方法
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Application No.: US13119916Application Date: 2009-09-01
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Publication No.: US08368413B2Publication Date: 2013-02-05
- Inventor: Stojan Kanev , Frank Fehrmann , Jens Fiedler , Claus Dietrich , Jörg Kiesewetter
- Applicant: Stojan Kanev , Frank Fehrmann , Jens Fiedler , Claus Dietrich , Jörg Kiesewetter
- Agency: Dascenzo Intellectual Propert Law, P.C.
- Priority: DE102008048081 20080919
- International Application: PCT/EP2009/061274 WO 20090901
- International Announcement: WO2010/031685 WO 20100325
- Main IPC: G01R31/00
- IPC: G01R31/00

Abstract:
The invention relates to a method for testing several electronic components (1) of a repetitive pattern under defined thermal conditions in a prober, which comprises a chuck (10) for holding the components (1) and special holding devices (15) for holding individual probes (12). For testing, the components (1) are adjusted to a defined temperature, the probes (12) and a first electronic component (1) are positioned relative to each other by means of at least one positioning device, contact pads (3) of the electronic component (1) are subsequently contacted by the probes (12) so that the component (1) can be tested and then the positioning and the contacting can be repeated for testing another component (1) of the repetitive pattern. In order to shorten the test time for measurements at changing temperatures while ensuring reliable contacting of the components by using individual probes, a component (1) is positioned and contacted by a first positioning step which jointly affects all probes (12) first being carried out in an intermediate position, in the result of which the component (1) lies at a defined distance under the probe tips (13), the position of each individual probe tip (13) being subsequently corrected by means of separate manipulators to the position of the corresponding contact pad (3) to be contacted with the particular probe tip (13) so that each probe tip (13) lies above a contact pad (3), and the probe tips (13) further subsequently being brought into contact with the contact pads (3) of the component (1) by means of an advancing movement.
Public/Granted literature
- US20110221461A1 METHOD FOR TESTING ELECTRONIC COMPONENTS OF A REPETITIVE PATTERN UNDER DEFINED THERMAL CONDITIONS Public/Granted day:2011-09-15
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