Invention Grant
- Patent Title: Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing
- Patent Title (中): 微电机械开关梁结构,最小化波束失真和构造方法
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Application No.: US12755285Application Date: 2010-04-06
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Publication No.: US08368490B2Publication Date: 2013-02-05
- Inventor: Raymond Goggin , Padraig Fitzgerald
- Applicant: Raymond Goggin , Padraig Fitzgerald
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Kenyon & Kenyon LLP
- Main IPC: H01H51/22
- IPC: H01H51/22

Abstract:
Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.
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