Invention Grant
- Patent Title: Optical inspection system and method
- Patent Title (中): 光学检测系统及方法
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Application No.: US13277986Application Date: 2011-10-20
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Publication No.: US08368881B2Publication Date: 2013-02-05
- Inventor: Lars Markwort , Rajeshwar Chhibber , Klaus Eckerl , Norbert Harendt
- Applicant: Lars Markwort , Rajeshwar Chhibber
- Applicant Address: DE Unterschleissheim
- Assignee: Nanda Technologies GmbH
- Current Assignee: Nanda Technologies GmbH
- Current Assignee Address: DE Unterschleissheim
- Agency: Silicon Valley Patent Group LLP
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G06K9/00
Abstract:
An inspection system includes optics, an object support for mounting an object in a region of an object plane of the optics, a bright-field light source, and a dark-field light source. The inspection system also includes an image detector having a radiation sensitive substrate disposed in a region of an image plane of the optics and a beam dump.
Public/Granted literature
- US20120133760A1 OPTICAL INSPECTION SYSTEM AND METHOD Public/Granted day:2012-05-31
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