Invention Grant
US08370961B1 Providing a topographic signal of sample using atomic force microscope
失效
使用原子力显微镜提供样品的地形信号
- Patent Title: Providing a topographic signal of sample using atomic force microscope
- Patent Title (中): 使用原子力显微镜提供样品的地形信号
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Application No.: US13249890Application Date: 2011-09-30
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Publication No.: US08370961B1Publication Date: 2013-02-05
- Inventor: Christopher Ryan Moon , Daniel Y. Abramovitch
- Applicant: Christopher Ryan Moon , Daniel Y. Abramovitch
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01Q10/00
- IPC: G01Q10/00

Abstract:
An atomic force microscope (AFM) apparatus for determining a topography of a sample surface is disclosed. The AFM apparatus comprises: a controller having a controller frequency response and being configured to provide a controller output signal. The controller comprises an integrator that provides an integrator output signal, and a filter block. The AFM apparatus also comprises a physical system having a physical system response and being configured to receive the controller output signal and to provide a probe height in response to the controller output signal. The physical system comprises an actuator configured to maintain a deflection of a probe tip relative to the sample surface. The deflection being is indicated by a deflection signal, and the filter block of the controller provides an inverse of the physical system response, such that the probe height is substantially equal to the integrator output signal.
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