Invention Grant
- Patent Title: Micromechanical sensor element for capacitive differential pressure detection
- Patent Title (中): 用于电容差压检测的微机械传感器元件
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Application No.: US13023855Application Date: 2011-02-09
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Publication No.: US08371180B2Publication Date: 2013-02-12
- Inventor: Christian Doering , Remigius Has
- Applicant: Christian Doering , Remigius Has
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102010001797 20100211
- Main IPC: G01L1/00
- IPC: G01L1/00

Abstract:
A sensor concept for capacitive pressure measurement yields reliable measurement results and is for aggressive particle-bearing measuring environments. This sensor element is a micromechanical sensor element, whose structural elements are implemented in a layered structure. The sensor element includes two pressure connections separated from each other, a deflectable carrier element for at least one deflectable measuring electrode, and at least one stationary counter electrode for the measuring electrode. The carrier element spans a closed cavity in the layered structure. The carrier element is spanned by a cap structure, and is suspended on the cap structure via a suspension web functioning as a rocker bearing. The two pressure connections are connected to the carrier element's top side which is divided by the suspension web into two separated pressure connection zones. The measuring electrode is on the carrier element's underside and the counter electrode is on the cavity's opposite wall.
Public/Granted literature
- US20110192236A1 Micromechanical sensor element for capacitive differential pressure detection Public/Granted day:2011-08-11
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