Invention Grant
US08372305B2 Chemical-mechanical polishing composition comprising metal-organic framework materials
有权
包含金属 - 有机骨架材料的化学机械抛光组合物
- Patent Title: Chemical-mechanical polishing composition comprising metal-organic framework materials
- Patent Title (中): 包含金属 - 有机骨架材料的化学机械抛光组合物
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Application No.: US12600539Application Date: 2008-05-21
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Publication No.: US08372305B2Publication Date: 2013-02-12
- Inventor: Markus Schubert , Sven Thate
- Applicant: Markus Schubert , Sven Thate
- Applicant Address: DE Ludwigshafen
- Assignee: BASF SE
- Current Assignee: BASF SE
- Current Assignee Address: DE Ludwigshafen
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: EP07108798 20070524
- International Application: PCT/EP2008/056230 WO 20080521
- International Announcement: WO2008/142093 WO 20081127
- Main IPC: C09K13/00
- IPC: C09K13/00

Abstract:
The present invention relates to compositions for chemical-mechanical polishing comprising A 0.01% to 40% by weight based on the total amount of the composition of abrasive particles of at least one porous metal-organic framework material, wherein the framework material comprises at least one at least bidentate organic compound which is coordinately bound to at least one metal ion; B 40% to 99.8% by weight based on the total amount of the composition of a liquid carrier; and C 0.01% to 20% by weight based on the total amount of the composition of a polishing additive component. The invention further relates to the use of said composition as well as methods for chemical-mechanical polishing of a surface with the aid of said compositions.
Public/Granted literature
- US20100178767A1 CHEMICAL-MECHANICAL POLISHING COMPOSITION COMPRISING METAL-ORGANIC FRAMEWORK MATERIALS Public/Granted day:2010-07-15
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