Invention Grant
US08372305B2 Chemical-mechanical polishing composition comprising metal-organic framework materials 有权
包含金属 - 有机骨架材料的化学机械抛光组合物

  • Patent Title: Chemical-mechanical polishing composition comprising metal-organic framework materials
  • Patent Title (中): 包含金属 - 有机骨架材料的化学机械抛光组合物
  • Application No.: US12600539
    Application Date: 2008-05-21
  • Publication No.: US08372305B2
    Publication Date: 2013-02-12
  • Inventor: Markus SchubertSven Thate
  • Applicant: Markus SchubertSven Thate
  • Applicant Address: DE Ludwigshafen
  • Assignee: BASF SE
  • Current Assignee: BASF SE
  • Current Assignee Address: DE Ludwigshafen
  • Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
  • Priority: EP07108798 20070524
  • International Application: PCT/EP2008/056230 WO 20080521
  • International Announcement: WO2008/142093 WO 20081127
  • Main IPC: C09K13/00
  • IPC: C09K13/00
Chemical-mechanical polishing composition comprising metal-organic framework materials
Abstract:
The present invention relates to compositions for chemical-mechanical polishing comprising A 0.01% to 40% by weight based on the total amount of the composition of abrasive particles of at least one porous metal-organic framework material, wherein the framework material comprises at least one at least bidentate organic compound which is coordinately bound to at least one metal ion; B 40% to 99.8% by weight based on the total amount of the composition of a liquid carrier; and C 0.01% to 20% by weight based on the total amount of the composition of a polishing additive component. The invention further relates to the use of said composition as well as methods for chemical-mechanical polishing of a surface with the aid of said compositions.
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