The invention discloses a sterilization device (1), to sterilize media, equipment and/or decontamination of waste material, said sterilization device (1) comprising a chamber (2), at least one exhaust line (6) arranged to said chamber (2) and at least one gas generator arranged to said chamber (2), at least two sterile filters (8a, 8b) arranged in series in the exhaust line (6), at least one vacuum means (7) connected to the chamber (2) via said exhaust line (6) and said at least two filters (8a, 8b). At least one heating means (9) is arranged to said exhaust line (6) between said two sterile filters (8a, 8b) in order to vaporize condensate that develops between the filters. Furthermore, it is disclosed a sterilization process for sterilization of media, equipment and/or decontamination of waste material, a vaporizing system (12) of a sterilization device and use of such a vaporizing system (12) in a sterilization device.