Invention Grant
US08372470B2 Apparatus and methods for controlled growth and assembly of nanostructures 有权
用于控制生长和组装纳米结构的装置和方法

Apparatus and methods for controlled growth and assembly of nanostructures
Abstract:
A method and apparatus providing controlled growth and assembly of nanostructures is presented. A first substrate including at least one reaction site is provided. Energy is provided to the reaction site and a reaction species is introduced to the first substrate. A nanostructure is grown from the reaction site. The growth process of the nanostructure is controlled while continuously monitoring the properties of at least one of the nanostructure and the at least one reaction site, and by controlling process variables based on the monitored properties of the nanostructure and the at least one reaction site.
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