Invention Grant
- Patent Title: Film-formation method, method for manufacturing electro-optical device, electro-optical device, and electronic apparatus
- Patent Title (中): 成膜方法,电光装置的制造方法,电光装置和电子装置
-
Application No.: US12552577Application Date: 2009-09-02
-
Publication No.: US08372490B2Publication Date: 2013-02-12
- Inventor: Toyotaro Kinoshita
- Applicant: Toyotaro Kinoshita
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2008-229469 20080908
- Main IPC: B05D3/00
- IPC: B05D3/00

Abstract:
A film-formation method is a method for depositing a liquid containing a film material to form a film in a prescribed film formation area enclosed by a partition wall on a substrate. The film-formation method includes forming the partition wall using at least in part a wettability-variable material in which wettability with respect to the liquid is variable, depositing the liquid in the film formation area, varying the wettability of the wettability-variable material in the partition wall in a state in which the liquid is disposed within the film formation area so that liquid affinity of the wettability-variable material becomes higher than liquid affinity of the wettability-variable material before the liquid is deposited in the film formation area, and forming the film by solidifying the film material in the liquid.
Public/Granted literature
Information query