Invention Grant
- Patent Title: Fiber laser substrate processing
- Patent Title (中): 光纤激光基板加工
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Application No.: US12761306Application Date: 2010-04-15
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Publication No.: US08372667B2Publication Date: 2013-02-12
- Inventor: Stephen Moffatt
- Applicant: Stephen Moffatt
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G01R31/26
- IPC: G01R31/26 ; H01L21/66
Abstract:
Embodiments of the present invention pertain to substrate processing equipment and methods incorporating light sources which provide independent control of light pulse duration, shape and repetition rate. Embodiments further provide rapid increases and decreases in intensity of illumination.
Public/Granted literature
- US20100267173A1 Fiber Laser Substrate Processing Public/Granted day:2010-10-21
Information query
