Invention Grant
- Patent Title: Method of seperating two material systems
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Application No.: US12285905Application Date: 2008-10-16
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Publication No.: US08372673B2Publication Date: 2013-02-12
- Inventor: Ya-Ju Lee , Ta-Cheng Hsu , Min-Hsun Hsieh
- Applicant: Ya-Ju Lee , Ta-Cheng Hsu , Min-Hsun Hsieh
- Applicant Address: TW
- Assignee: Epistar Corporation
- Current Assignee: Epistar Corporation
- Current Assignee Address: TW
- Agency: Bacon & Thomas, PLLC
- Priority: TW96138802A 20071016
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
An embodiment of this invention discloses a method of separating two material systems, which comprises steps of providing a bulk sapphire; forming a nitride system on the bulk sapphire; forming at least two channels between the bulk sapphire and the nitride system; etching at least one inner surface of the channel; and separating the bulk sapphire and the nitride system.
Public/Granted literature
- US20090111205A1 Method of seperating two material systems Public/Granted day:2009-04-30
Information query
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