Invention Grant
US08372737B1 Use of a shadow mask and a soft mask for aligned implants in solar cells
失效
在太阳能电池中使用荫罩和软面罩对准植入物
- Patent Title: Use of a shadow mask and a soft mask for aligned implants in solar cells
- Patent Title (中): 在太阳能电池中使用荫罩和软面罩对准植入物
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Application No.: US13170792Application Date: 2011-06-28
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Publication No.: US08372737B1Publication Date: 2013-02-12
- Inventor: Nicholas P. T. Bateman , Benjamin B. Riordon , Atul Gupta
- Applicant: Nicholas P. T. Bateman , Benjamin B. Riordon , Atul Gupta
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01L21/425
- IPC: H01L21/425
Abstract:
An improved method of implanting a solar cell is disclosed. A substrate is coated with a soft mask material. A shadow mask is used to perform a pattern ion implant and to set the soft mask material. After the soft mask material is set, the mask is removed and a blanket implant is performed.
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