Invention Grant
- Patent Title: Dual ohmic contact to N- and P-type silicon carbide
- Patent Title (中): 与欧姆接触的N-和P型碳化硅
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Application No.: US12791276Application Date: 2010-06-01
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Publication No.: US08373175B1Publication Date: 2013-02-12
- Inventor: Robert S. Okojie
- Applicant: Robert S. Okojie
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Administrator of National Aeronautics and Space Administration
- Current Assignee: The United States of America as represented by the Administrator of National Aeronautics and Space Administration
- Current Assignee Address: US DC Washington
- Agent Robert H. Earp, III
- Main IPC: H01L29/12
- IPC: H01L29/12

Abstract:
Simultaneous formation of electrical ohmic contacts to silicon carbide (SiC) semiconductor having donor and acceptor impurities (n- and p-type doping, respectively) is disclosed. The innovation provides for ohmic contacts formed on SiC layers having n- and p-doping at one process step during the fabrication of the semiconductor device. Further, the innovation provides a non-discriminatory, universal ohmic contact to both n- and p-type SiC, enhancing reliability of the specific contact resistivity when operated at temperatures in excess of 600° C.
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