Invention Grant
US08373175B1 Dual ohmic contact to N- and P-type silicon carbide 有权
与欧姆接触的N-和P型碳化硅

Dual ohmic contact to N- and P-type silicon carbide
Abstract:
Simultaneous formation of electrical ohmic contacts to silicon carbide (SiC) semiconductor having donor and acceptor impurities (n- and p-type doping, respectively) is disclosed. The innovation provides for ohmic contacts formed on SiC layers having n- and p-doping at one process step during the fabrication of the semiconductor device. Further, the innovation provides a non-discriminatory, universal ohmic contact to both n- and p-type SiC, enhancing reliability of the specific contact resistivity when operated at temperatures in excess of 600° C.
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