Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US12913759Application Date: 2010-10-27
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Publication No.: US08373216B2Publication Date: 2013-02-12
- Inventor: Hiraku Chakihara , Yasushi Ishii
- Applicant: Hiraku Chakihara , Yasushi Ishii
- Applicant Address: JP Kawasaki-shi
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Miles & Stockbridge P.C.
- Priority: JP2009-248002 20091028; JP2010-69271 20100325; JP2010-203164 20100910
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
Technique of improving a manufacturing yield of a semiconductor device including a non-volatile memory cell in a split-gate structure is provided. A select gate electrode of a CG shunt portion is formed so that a second height d2 from the main surface of the semiconductor substrate of the select gate electrode of the CG shunt portion positioned in the feeding region is lower than a first height d1 of the select gate electrode from the main surface of the semiconductor substrate in a memory cell forming region.
Public/Granted literature
- US20110095348A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-04-28
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