Invention Grant
- Patent Title: Device to detect and measure static electric charge
- Patent Title (中): 用于检测和测量静电荷的装置
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Application No.: US12873531Application Date: 2010-09-01
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Publication No.: US08373232B2Publication Date: 2013-02-12
- Inventor: José Solo De Zaldivar , Philip John Poole
- Applicant: José Solo De Zaldivar , Philip John Poole
- Applicant Address: CH Zürich
- Assignee: Microdul AG
- Current Assignee: Microdul AG
- Current Assignee Address: CH Zürich
- Agency: The Webb Law Firm
- Priority: EP09169252 20090902
- Main IPC: H01L23/62
- IPC: H01L23/62 ; G01R29/12
Abstract:
A device (10) to detect and measure static electric charge (q) on an object (100) being positioned in a distance (r.) from an input electrode (11) of the device (10) comprises at least one MOS field transistor (20). The input electrode (11) is connected with the gate electrode (21) of the MOS-FET (20) to detect said electrical charge. The MOS-FET (20) can comprise a gate oxide layer underneath the gate (21) and over the source (22) and drain (23) areas having a sufficient thickness to allow the MOS field transistor (20) to withstand several kilovolts (kV) of voltage and to avoid the loss of charges by tunnel effect due to the high potential of the gate electrode during ESD events.
Public/Granted literature
- US20110049586A1 Device to Detect and Measure Static Electric Charge Public/Granted day:2011-03-03
Information query
IPC分类:
