Invention Grant
US08373235B2 Semiconductor memory device and production method therefor 有权
半导体存储器件及其制造方法

Semiconductor memory device and production method therefor
Abstract:
In a static memory cell comprising six MOS transistors, the MOS transistors have a structure in which the drain, gate and source formed on the substrate are arranged in the vertical direction and the gate surrounds the columnar semiconductor layer, the substrate comprises a first active region having a first conductive type and a second active region having a second conductive type, and diffusion layers constructing the active regions are mutually connected via a silicide layer formed on the substrate surface, thereby realizing an SRAM cell with small surface area. In addition, drain diffusion layers having the same conductive type as a first well positioned on the substrate are surrounded by a first anti-leak diffusion layer and a second anti-leak diffusion layer having a conductive type different from the first well and being shallower than the first well, and thereby controlling leakage to the substrate.
Public/Granted literature
Information query
Patent Agency Ranking
0/0