Invention Grant
- Patent Title: Semiconductor memory device and production method therefor
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US12784826Application Date: 2010-05-21
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Publication No.: US08373235B2Publication Date: 2013-02-12
- Inventor: Fujio Masuoka , Shintaro Arai
- Applicant: Fujio Masuoka , Shintaro Arai
- Applicant Address: SG Peninsula Plaza
- Assignee: Unisantis Electronics Singapore Pte Ltd.
- Current Assignee: Unisantis Electronics Singapore Pte Ltd.
- Current Assignee Address: SG Peninsula Plaza
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2009-123882 20090522
- Main IPC: H01L27/088
- IPC: H01L27/088

Abstract:
In a static memory cell comprising six MOS transistors, the MOS transistors have a structure in which the drain, gate and source formed on the substrate are arranged in the vertical direction and the gate surrounds the columnar semiconductor layer, the substrate comprises a first active region having a first conductive type and a second active region having a second conductive type, and diffusion layers constructing the active regions are mutually connected via a silicide layer formed on the substrate surface, thereby realizing an SRAM cell with small surface area. In addition, drain diffusion layers having the same conductive type as a first well positioned on the substrate are surrounded by a first anti-leak diffusion layer and a second anti-leak diffusion layer having a conductive type different from the first well and being shallower than the first well, and thereby controlling leakage to the substrate.
Public/Granted literature
- US20100295135A1 SEMICONDUCTOR MEMORY DEVICE AND PRODUCTION METHOD THEREFOR Public/Granted day:2010-11-25
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